An object of the present invention is to provide a MEMS vibrator or the like that has excellent chemical resistance and an excellent mechanical strength and that is easily thinned. The present invention is a MEMS vibrator comprising: a vibrating film including a graphite film; and a silicon member supporting the vibrating film, the graphite film having a thickness of 50 nm or more and less than 20 µm, and the graphite film having a Young's modulus along a graphite film plane direction of 700 GPa or more.
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