PELLICLE INCLUDING GRAPHITE FILM

摘要

Conventional pellicles have had a problem in achieving both a high extreme ultraviolet (EUV) transmittance and a uniformity in EUV transmittance. The present invention provides a pellicle achieving both a high EUV transmittance and a uniformity in EUV transmittance by using a graphite thin film having a film thickness of 5 nm or more and 30 nm or less and a surface roughness (Sa) of 0.1 nm or more and 500 nm or less.