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WAVEFRONT SENSOR AND ASSOCIATED METROLOGY APPARATUS
WAVEFRONT SENSOR AND ASSOCIATED METROLOGY APPARATUS
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机译:波前传感器和相关的计量装置
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摘要
Disclosed is a wavefront sensor for measuring a tilt of a wavefront at an array of locations across a beam of radiation, wherein said wavefront sensor comprises a film, for example of Zirconium, having an indent array comprising an indent at each of said array of locations, such that each indent of the indent array is operable to perform focusing of said radiation. Also disclosed is a radiation source and inspection apparatus comprising such a wavefront sensor.
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