Electromechanical resonators based on metal chalcogenide nanotubes

摘要

Problem to be solved: to provide an electromechanical resonator and a method of manufacturing the same.The manufacturing method isPreparing a substrateAttaching at least a first pad and a second pad on the substrate so as not to contact each other, andAt least one metal chalcogenide nanotube on the first and second padsThe first region of the nanotube is in contact with the first padSo that the second region of the nanotube contacts the second padAttaching steps andIt is the step of attaching the pedals on the nanotube so that the pedals come into contact with the nanotubes.The pedals are positioned asymmetrically against nanotubesAndRemove the substrate surface layer under the nanotubes andThe step of stopping the nanotube above the substrate is.No selection