Meta surface having asymmetric grating for redirecting light and manufacturing method

摘要

The optical system includes an optically transmissive substrate that includes a metasurface including a grating that includes a plurality of unit cells. Each unit cell includes a laterally extending first nanobeam having a first width and a laterally extending second nanobeam spaced from the first nanobeam by a gap, The second nanobeam has a second width greater than the first width. The unit cell pitch is 10 nm to 1 μm. The height of the first and second nanobeams is 10 nm to 450 nm, and the refractive index of the substrate is higher than 3.3 and 10 nm to 1 μm, and the refractive index is 3.3 or more Is less than.