Fluorescent X-ray analysis apparatus and control method of X-ray fluorescence analyzer

摘要

Problem to be solved: to provide a fluorescence X-ray analysis apparatus capable of preventing deterioration or breakage of the sample and preventing contamination inside the apparatus even if an abnormal condition occurs in the X-ray fluorescence spectrometer, and a method of controlling the X-ray fluorescence analyzer.A moving mechanism for moving a sample between a standby position and a measurement positionAn X-ray source for irradiating a primary X-ray to the sampleDetector for measuring intensity of incident X-ray fluorescenceA first control unit for controlling the movement mechanism and the operation of the X-ray sourceMeasurement unit withAnalysis of the sample based on the intensity of said fluorescent X-ray measured by said detectorCommunicate with the first control sectionA second control section for controlling said measurement sectionInformation processing DepartmentAndThe first control unitWhen communication between the first control unit and the second control unit is interruptedFor the moving mechanismThere is a saving means for saving the sample at the measurement position in the standby position.Diagram