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DEVICE AND METHOD FOR MEASURING THICKNESS AND REFRACTIVE INDEX OF MULTILAYER THIN FILM BY USING ANGLE-RESOLVED SPECTRAL REFLECTOMETRY
DEVICE AND METHOD FOR MEASURING THICKNESS AND REFRACTIVE INDEX OF MULTILAYER THIN FILM BY USING ANGLE-RESOLVED SPECTRAL REFLECTOMETRY
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机译:使用角度分辨光谱反射测量多层薄膜厚度和折射率的装置和方法
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摘要
The present disclosure relates to an apparatus and method for measuring the thickness and refractive index of a multilayer thin film by measuring angle-resolved spectral reflectance according to light polarization. According to an exemplary embodiment of the present disclosure, the apparatus and method for measuring the thickness and refractive index of a multilayer structure using angle-resolved spectroscopic reflectometry is capable of measuring and analyzing thickness and refractive index of each layer of a structure having a multilayer thin film through an s-polarized imaging and a p-polarized imaging of the reflective light located in a back focal plane of an objective lens which are acquired through an angle-resolved spectral imaging acquisition part.
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