Local strain fields in epitaxial layers on Creo

摘要

Problem to be solved: to provide a local distortion field in the epitaxial layer on the Creo.A layered structure (100) for transmission of acoustic waves;Layered structureSubstrate layer (102) andA second layer (104) on the substrate layer (102) andEquipped withThe second layer (104) comprises a plurality of discrete portions (105) adjacent to each otherEach discrete portion (105) of a plurality of discrete portionsComprises a first subsection (104a) and a second subsection (104B).An epitaxial layer (108) is grown on the second layer (104) and the acoustic wave is transmitted on the principal surface of the epitaxial layer (108) and the period of the wavelength of the acoustic wave transmitted through the epitaxial layer λ） The width of the first subregion (104a) is approximately equal to the sum of the width (DA) of the first subregion (104a) and the width of the second subsection (104B).Diagram