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SCANNER DRIVEN BY PIEZOELECTRIC ACTUATORS AND METHOD OF MAKING THE SAME
SCANNER DRIVEN BY PIEZOELECTRIC ACTUATORS AND METHOD OF MAKING THE SAME
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机译:由压电致动器驱动的扫描仪及其制造方法
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摘要
A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.
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