PIEZO-DRIVEN ULTRA PRECISE SCANNER DRIVING DEVICE AND A DRIVING METHOD THEREOF CAPABLE OF BEING DRIVEN SYMMETRICALLY BY APPLYING THE SAME REFERENCE VOLTAGE IN THE PIEZOELECTRIC ELEMENT

摘要

PURPOSE: A piezo-driven ultra precise scanner driving device and a driving method thereof are provided to maintain the same dynamic characteristic by driving the output plate through the power of a piezoelectric element when the output plate is restored from the initial position.;CONSTITUTION: A piezo-driven ultra precise scanner driving device(100) comprises an output plate(101), first and second displacement driving units(110, 120), a voltage command unit(130) and a voltage regulator(140). The ultra-detailed components are installed in the output plate. The output plate is linearly moved. In order that the output plate is moved to the left side, the first displacement driving unit selectively applies the attraction in the output plate. The voltage command unit generates a reference command voltage and a driving command voltage. The reference command voltage sets-up the output plate at the reference location. The driving command voltage transfers the output plate to the left side or the right side. The voltage regulator transfers the controlled voltage to first and second displacement driving units.;COPYRIGHT KIPO 2012