Bipolar electrostatic chuck having nonpolar pattern

摘要

As the disclosed bipolar electrostatic chuck having a non-polar pattern includes an electrostatic chuck body member, a first electrode member, a second electrode member, and a non-polar filling member, the first electrode member is widened to prevent arc and short circuits from occurring By forming the form in which the non-polar filling member is filled in the space between the and the second electrode member, the chucking target can be supported by the non-polar filling member as well as the first and second electrode members, Accordingly, the formation of minute marks in the form of concavities and convexities formed on the surface of the chucking target by the first electrode member, the second electrode member, and the gap between the first electrode member and the second electrode member can be minimized. , there is an advantage in that the occurrence of arcs and short circuits in the bipolar electrostatic chuck having the non-polar pattern can be prevented.