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Laser interference fringe control for higher EUV light source and EUV throughput
Laser interference fringe control for higher EUV light source and EUV throughput
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机译:激光干涉条纹控制,用于更高的EUV光源和EUV吞吐量
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摘要
A method for generating an extreme ultraviolet (EUV) radiation includes simultaneously irradiating two or more target droplets with laser light in an EUV radiation source apparatus to produce EUV radiation and collecting and directing the EUV radiation produced from the two or more target droplet by an imaging mirror.
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