2 2 2 ATOMIC LAYER-BASED SURFACE TREATMENT DEVICE FOR TWO-DIMENSIONAL MATERIALS METHOD FOR SURFACE TREATMENT OF TWO-DIMENSIONAL MATERIALS USING THE SAMEAND SURFACE-TREATED TWO-DIMENSIONAL MATERIAL USING THE SAME

摘要

The present invention relates to a surface treatment device capable of treating the surface of a sample, which is a two-dimensional material, in an atomic layer unit. The surface treatment apparatus of the present invention includes a tube that is formed elongated in one direction; a plasma generator formed on the tube and including electrodes capable of generating a potential difference; and a sample holder in which a sample surface-treated by the plasma generated from the plasma generator is located in the tube, and is installed at or outside the boundary of an area occupied by the plasma generator in one direction.