Aligner device and workpiece misalignment correction method

摘要

PROBLEM TO BE SOLVED: To provide an aligner device for detecting a misalignment amount of a plurality of workpieces. SOLUTION: The aligner device A1 has a robot hand, a work lift mechanism, and a downward sensor surface, and can detect the outer shape of a plate-shaped work that is close to or in contact with the sensor surface by the work lift mechanism, and can detect up and down. From the plurality of sensors 31, 32, 33 ... Arranged at predetermined intervals in the direction and the outer shape of each plate-shaped work acquired by each sensor, X, Y from the reference position of each plate-shaped work. Based on the misalignment amount calculating means 6 for calculating the misalignment amount in the θ direction and the misalignment amount in the XY direction calculated by the misalignment amount calculating means 6, the misalignment amount in the X direction for each plate-shaped workpiece. And, based on the θ-direction misalignment amount calculated by the XY-direction misalignment correction means 81 and the misalignment amount calculation means 6 for correcting the Y-direction misalignment amount, the θ-direction misalignment amount for each plate-shaped workpiece. The θ-direction displacement amount correction means 82 for correcting the above. [Selection diagram] Fig. 3