Work misalignment detection device, aligner device and work misalignment correction method

摘要

PROBLEM TO BE SOLVED: To provide an aligner device configured to be able to detect a misalignment amount of a plurality of workpieces. SOLUTION: A robot hand 1 each of which can place and hold a plate-shaped work and has a plurality of hand bodies arranged in the vertical direction, and a plate-shaped work carried by the robot hand and placed on each of the above hand bodies are separately separated. Detecting the outer shape of a plate-shaped workpiece having a work lift mechanism 5 that can be lifted and lifted from the lifted state and an upward sensor surface and brought close to or in contact with the sensor surface by the work lift mechanism 5. The positions of the plurality of sensors 31, 32, 33, which are arranged at predetermined intervals in the vertical direction, and the outer shape of each plate-shaped work acquired by each sensor, deviate from the reference position of each plate-shaped work. The position deviation amount calculating means 6 for calculating the amount is provided. [Selection diagram] Fig. 3