Semiconductor device model data generation method and semiconductor device analysis system

摘要

PROBLEM TO BE SOLVED: To improve the efficiency of model data creation. SOLUTION: The model data generation method of the embodiment is to execute analysis of the characteristics of the semiconductor device using the first model data of the semiconductor device (S3), and to generate the first model data of the first size with respect to the first model data. The second model data is generated by the processing based on the division condition (S4), and the third model data is generated by the processing based on the second division condition of the second size different from the first size with respect to the first model data. The third size is based on the results of the generation (S6), the execution of the analysis process using the second and third model data (S5, S7), and the analysis process of the first to third model data. It includes setting the third division condition (S8, S9) and generating the fourth model data by the third division process based on the third division condition for the first model data (S10). [Selection diagram] FIG. 11