Flow control system, flow control system control method, flow control system control program

摘要

PROBLEM TO BE SOLVED: To provide a pressure-insensitive flow rate control system capable of accurately obtaining a flow rate regardless of the type of fluid. A flow rate control system including a flow rate control device 30 that controls the flow rate of a fluid supplied to a controlled object to maintain a desired flow rate set value, the flow rate sensor 102 for measuring the flow rate of the fluid, and the flow rate. A pressure sensor 103 that measures the pressure on the primary side of the control device, a PI calibration value determination unit that determines the PI calibration value based on at least a physical property value coefficient corresponding to the physical property value of the fluid, and a PI calibration value and a pressure sensor. Based on the measured value, the correction unit that corrects the estimated flow rate by the flow rate sensor and the opening degree of the valve 105 that supplies the fluid to the controlled object based on the estimated flow rate corrected by the correction unit are adjusted to adjust the opening degree of the fluid. A flow rate control system including a drive control circuit that controls the flow rate so as to reach a flow rate set value. [Selection diagram] Fig. 2