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Flow Rate Control System, Control Method of FlowRate Control System, and Control Program of FlowRate Control System
Flow Rate Control System, Control Method of FlowRate Control System, and Control Program of FlowRate Control System
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机译:流量控制系统,流量控制系统控制方法,流量控制系统控制程序
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摘要
A flow rate control system including a flow rate controller controlling a flow rate of a fluid supplied to a controlled object to keep a desired flow rate set value is provided, and includes a flow rate sensor, a pressure sensor measuring a pressure of a primary side of the flow rate controller, a PI calibration value determination unit determining a PI calibration value based on at least a physical property coefficient according to a physical property value of the fluid, a correction unit correcting an estimated flow rate, based on the PI calibration value and a measured value, and a drive control circuit adjusting an opening of a valve supplying the fluid to the controlled object based on the estimated value and controlling the flow rate of the fluid. A flow rate is accurately calculated regardless of types of a fluid in the pressure insensitive type flow rate controller.
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