Manufacturing method of electromechanical conversion element, ultrasonic transducer, ultrasonic probe, ultrasonic diagnostic device and electromechanical conversion element

摘要

PROBLEM TO BE SOLVED: To provide an electromechanical conversion element capable of ensuring high frequency, high resolution, appropriate sound pressure and reception sensitivity. In an ultrasonic transducer having a plurality of piezoelectric elements 20, the piezoelectric element includes a substrate 11, a first electrode 21, a piezoelectric body 22, a second electrode 23, and a first electrode 21. The gaps 30 formed on the substrate 11 on the opposite side of the piezoelectric body 22 are sequentially laminated. The width Cw of the gap portion 30 and the width Pw of the piezoelectric body 22 when viewed from the direction of sequentially stacking satisfy the conditional expression (1): 0.65 ≦ Pw / Cw ≦ 0.95. [Selection diagram] FIG. 7