Calibration standard for measuring the geometry of a tactile and / or optically working measuring system, calibration method and coordinate measuring machine

摘要

The invention relates to a calibration standard for measuring the geometry of a tactile and / or optically operating measuring system, with a flat surface which has a structure that can be detected by an optically and / or tactilely operating measuring system. According to the invention, it is provided that the structure in a first direction and / or a second direction has a variable periodicity detectable by a sensor and a change in the periodicity encodes position information and / or direction information. Furthermore, the invention relates to a method for calibrating a tactile and / or optically operating coordinate measuring machine and a coordinate measuring machine for such a method or with such a calibration standard.