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Composition for forming a Group 4 transition metal-containing film for vapor phase growth of a Group 4 transition metal-containing film
Composition for forming a Group 4 transition metal-containing film for vapor phase growth of a Group 4 transition metal-containing film
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机译:用于形成第4组过渡金属薄膜的组合物,用于气相生长第4族过渡金属薄膜
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摘要
Group 4 transition metal-containing film forming compositions comprising Group 4 transition metal azatrane precursors are disclosed. Also disclosed are methods of synthesizing and using the disclosed precursors to deposit Group 4 transition metal-containing films on one or more substrates via vapor deposition processes.
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