AlN whisker manufacturing method and equipment and AlN whisker structure

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing apparatus of AlN whisker capable of suppressing contamination of metal particles; and to provide an AlN whisker structure.SOLUTION: In a manufacturing method of AlN whisker, an Al-containing material is heated inside a material housing part 1200 to generate Al gas, and Al gas is introduced from a communication part 1220 into a reaction chamber 1300, and nitrogen gas is introduced from a gas introduction port 1320 into the reaction chamber 1300, to thereby grow AlN whisker from the surface of an AlOsubstrate 1310 arranged inside the reaction chamber 1300.SELECTED DRAWING: Figure 1