Separation Detection System of Secondary Electron and backscatteed Electron for Electron Microscope

摘要

The present invention relates to a separation detection system that increases detection efficiency by separating the paths of secondary electrons and backscattered electrons that travel in opposite directions of an electron beam incident on a sample from each other. In the system, through a simple structural change in which only an electric field that horizontally moves the traveling path of the incident electron beam and returns it to its original position or in a parallel traveling direction is applied in a symmetrical direction, the electric field does not mix secondary electrons and backscattered electrons with each detector It shows the effect of improving the image quality of the electron microscope by directing it to