Secondary electron emission coefficient measuring device

摘要

PROBLEM TO BE SOLVED: To provide a highly accurate secondary electron emission coefficient measuring device. SOLUTION: The first collecting plate includes a scanning electron microscope, a first collecting plate, a second collecting plate, a first current meter, a second current meter, a voltmeter, and a Faraday cup. It has a first through hole, the second collection plate has a second through hole, the first collection plate and the second collection plate are installed in the cavity of the scanning electron microscope, and are spaced parallel to each other. Installed, the measurement sample is installed between the first collection plate and the second collection plate, the Faraday cup is installed in the cavity of the scanning electron microscope, the Faraday cup has an electron inlet, the first through hole, the first The two through holes and the electron inlet are installed through the first through hole, the second through hole, and the electron inlet are installed in the cavity of the scanning electron microscope, and the high energy electron beam is installed through the first through hole and the second through hole. It passes through the through holes in sequence and enters the Faraday cup. [Selection diagram] Fig. 2