Method for measuring secondary electron emission coefficient

摘要

Problem to be solved: to provide a method of measuring a secondary electron emission coefficient of high accuracy.Scanning electron microscope and scanning electron microscopeFirst collection boardThe second collection board andFirst current meterSecond current meterVoltmeterFaraday cupIncludingInjection current I enter the Faraday cup I first step to measure the injection current andThe first and second collection plates are short circuitedPlace the measurement sample between the first collection plate and the second collection plateA positive voltage of 50 volts is applied between the measurement sample and the first collection plateA second step to acquire the current iother of electrons other than secondary electrons andThe first and second collection plates are short circuitedA positive voltage is applied between the first collection plate and the measurement sampleA third step of obtaining the current ISS formed by secondary electrons andThe ratio of IE and I injection current is calculated.Secondary electron emission coefficient δ .Diagram