Method for manufacturing base material with water- and oil-repellent layer, vapor-deposited material and base material with water- and oil-repellent layer

摘要

Provided are a method for manufacturing a base material having a water-repellent oil-repellent layer, a vapor-deposited material, and a base material having a water-repellent oil-repellent layer, which have excellent wear resistance of the water-repellent oil-repellent layer. The base material with a water-repellent oil-repellent layer of the present invention is a base material with a water-repellent oil-repellent layer having a base material, a base layer, and a water-repellent oil-repellent layer in this order, and the water-repellent oil-repellent layer is a reactive silyl group. The underlying layer comprises an oxide comprising silicon and at least one element selected from the group consisting of titanium, zirconium and aluminum, and the underlying layer of silicon in the underlying layer. The ratio of the total molar concentration of titanium, zirconium and aluminum in the underlying layer to the molar concentration is 0.03 to 0.7.