Particle bound type silica particulate dispersion liquid and its manufacturing method, and abrasive particle dispersion for polishing

摘要

Problem to be solved: to provide a particle bound silica particulate dispersion liquid having excellent characteristics such as polishing ability, a manufacturing method thereof, and a abrasive particle dispersion solution.Particle bonded silica particulate dispersion of the inventionParticle dispersed silica fine particle dispersion containing particle bound silica fine particles composed of silica primary fine particlesSilica particles contained in particle bound silica fine particles containing particle bound silica particles composed of silica primary particles linked togetherProvide the following requirementsParticle linked silica particles having solid branched structure contained in silica fine particlesThis is characterized by the following requirements.[1] the average particle size (D1) measured by the dynamic light scattering method of the silica fine particles is in the range of 50 nm to 600 nm or less.[2] a particle bound silica fine particle having a three-dimensional branching structure has a structure having a chain shape and at least one branch (a) and a three-dimensional structure for this structure.No selection