Fine bubble cleaning device and micro bubble cleaning method

摘要

Even if the use of fine bubbles for the cleaning of semiconductors and electronic devices is attempted, the nano bubble is stable and the service life is long.At least one nano order fine bubble is generated in the cleaning liquidMicro bubble generator for producing nano bubble cleaning fluidA cleaning nozzle for discharging said nano bubble cleaning liquid toward an object to be washedA micro bubble cleaning device characterized by having a collision processing body disposed between the cleaning nozzle and the workpiece to be cleanedBecause micro bubbles are generated just before they come into contact with the objects to be cleanedEffective cleaning can be performed.