Fine bubble vacuum pump cleaning device and Cleaning method of vacuum pump using fine bubbles

摘要

An embodiment of the present invention provides a micro-bubble vacuum pump cleaning apparatus for cleaning without disassembling a vacuum pump used for vacuum formation of industrial equipment. The micro-bubble vacuum pump cleaning device includes a cleaning liquid tank; a bubble generating unit generating a fine bubble cleaning solution using the supplied gas for generating bubbles and the cleaning liquid supplied from the cleaning liquid tank; A first connection part connected to the inlet of the vacuum pump and a second connection part connected to the outlet of the vacuum pump for injecting the microbubble cleaning liquid into the vacuum pump or discharging the cleaning liquid after cleaning from the vacuum pump and a connecting part to which at least one vacuum pump is detachably coupled; and a pipe part connected to the bubble generating part and the connecting part to provide a passage for the microbubble cleaning liquid.