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Systems and Methods of High-Resolution Review for Semiconductor Inspection in Backend and Wafer Level Packaging
Systems and Methods of High-Resolution Review for Semiconductor Inspection in Backend and Wafer Level Packaging
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机译:后端和晶圆级封装中半导体检验高分辨率审查的系统和方法
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摘要
A review system and operation method directs a beam of light toward a sample on a stage. The sample is a wafer level packaging wafer or a backend wafer. Defect review is performed based on the light reflected from the sample. The review system can use one or more of: a fluid supplied by an immersion subsystem that includes a fluid supply unit and a fluid removal unit; an illumination pattern for differential phase contrast; or ultraviolet or deep ultraviolet wavelengths.
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