MACHINE LEARNING BASED SUBRESOLUTION ASSIST FEATURE PLACEMENT

摘要

A method for training a machine learning model to generate a characteristic pattern includes obtaining training data associated with a reference feature in a reference image. The training data includes (i) location data of each portion of the reference feature, and (ii) a presence value indicating whether the portion of the reference feature is located within a reference assist feature generated for the reference feature. The method includes training the machine learning model to predict a presence value based on the actual presence value in the training data. The predicted presence value indicates whether a portion of a feature (e.g., a skeleton point on a skeleton of a contour of the feature) is to be covered by an assist feature set. The training is performed based on the training data such that a metric between a predicted presence value and the presence value is minimized.