Assist feature placement based on machine learning

摘要

Obtaining a portion 505 of the design layout; Determining 520 the characteristics 530 of the assist features based on the portion 510's characteristics 510; And training 550 the machine learning model using training data 540 including a sample in which the feature vector includes the features 510 of the portion and the label including the features 530 of the assist features. A method is disclosed. The machine learning model can be used to determine 560 the characteristics of the assist features of any part of the design layout even if that part is not part of the training data.