USE OF MEMS GYROSCOPE FOR COMPENSATION OF ACCELEROMETER STRESS INDUCED ERRORS

摘要

A MEMS system includes a gyroscope that generates a quadrature signal and an angular velocity signal. The MEMS system further includes an accelerometer that generates a linear acceleration signal. The quadrature signal and the linear acceleration signal are received by a processing circuitry that modifies the linear acceleration signal based on the quadrature signal to determine linear acceleration.