COMPACT ACTUATORS, ELECTRICALLY PROGRAMMABLE MICROSCALE SURFACE OXIDE MEMORY ACTUATORS AND RELATED ROBOTIC DEVICES

摘要

Disclosed are devices, systems, and methods for fabrication of moving, actuatable structures at micron scales that can be electronically controlled using low power and low voltages. Also disclosed are microscale robots having such microscale actuator structures to actuate the robots' movements as well as devices, systems, and methods for fabrication of microscale robots. The disclosed methods of fabrication are compatible with standard semiconductor technologies.