Chamber Matching Using Neural Networks in Semiconductor Equipment Tools

摘要

The server trains the neural network by feeding the neural network with input time-series data of a first set of one or more sensors of the first processing chamber that are within specification to generate a corresponding first set of output time-series data. The server calculates the first error. The server feeds a second set of input time series data from corresponding one or more sensors associated with the second processing chamber under test to the trained neural network to generate a corresponding second set of output time series data. The server calculates a second error. a difference between a second error between the second set of input time series data and the corresponding second set of output time series data and a first error between the first set of input time series data and the corresponding first set of output time series data In response to being above the threshold amount, the server declares that the second processing chamber under test mismatches the first processing chamber that is within specifications.