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DUAL-FIELD-OF-VIEW OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM AND MATERIAL THICKNESS MEASUREMENT METHOD
DUAL-FIELD-OF-VIEW OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM AND MATERIAL THICKNESS MEASUREMENT METHOD
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机译:双视场光学相干断层扫描成像系统和材料厚度测量方法
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摘要
The present invention relates to a dual-field-of-view optical coherence tomography imaging system and a material thickness measurement method. The swept-frequency optical coherence tomography imaging system comprises a scanning imaging system, and a swept-frequency light source for providing a light source for the scanning imaging system; the scanning imaging system uses a DSV-OCT system, which comprises a sample arm and a reference arm that are respectively connected correspondingly to the swept-frequency light source; and the swept-frequency light source provides a sampling light source or a reference light source for the sample arm and the reference arm respectively. The sample arm is further correspondingly provided with a sample placement platform, which comprises an attitude adjusting unit for positioning a sample to be measured; and lights returned by the sample arm and the reference arm interfere with other to form an interference signal, which is detected by a balanced photodetector and transmitted back to a PC. Provided in the present invention is a dual-side-view OCT system, which further extends the OCT technology to the thickness measurement of opaque materials, thereby improving the precision of measuring the thickness of opaque materials.
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