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DUAL-FIELD-OF-VIEW OPTICAL COHERENCE TOMOGRAPHY IMAGING SYSTEM AND MATERIAL THICKNESS MEASUREMENT METHOD

机译:双视场光学相干断层扫描成像系统和材料厚度测量方法

摘要

The present invention relates to a dual-field-of-view optical coherence tomography imaging system and a material thickness measurement method. The swept-frequency optical coherence tomography imaging system comprises a scanning imaging system, and a swept-frequency light source for providing a light source for the scanning imaging system; the scanning imaging system uses a DSV-OCT system, which comprises a sample arm and a reference arm that are respectively connected correspondingly to the swept-frequency light source; and the swept-frequency light source provides a sampling light source or a reference light source for the sample arm and the reference arm respectively. The sample arm is further correspondingly provided with a sample placement platform, which comprises an attitude adjusting unit for positioning a sample to be measured; and lights returned by the sample arm and the reference arm interfere with other to form an interference signal, which is detected by a balanced photodetector and transmitted back to a PC. Provided in the present invention is a dual-side-view OCT system, which further extends the OCT technology to the thickness measurement of opaque materials, thereby improving the precision of measuring the thickness of opaque materials.
机译:本发明涉及一种双视场光学相干断层摄影系统和材料厚度测量方法。扫描频率光学相干断层摄影系统包括扫描成像系统,以及用于为扫描成像系统提供光源的扫描频率光源;扫描成像系统使用DSV-OCT系统,该DSV-OCT系统包括样品臂和参考臂,该参考臂分别对应于扫描频率光源连接;并且扫描频率光源分别为样品臂和参考臂提供采样光源或参考光源。示例臂进一步相应地设置有样品放置平台,其包括用于定位待测样品的姿态调节单元;由样品臂返回的灯和参考臂返回的灯与另一个以形成干扰信号,该干扰信号由平衡光电探测器检测并将其传输回PC。本发明提供了一种双侧视图OCT系统,其进一步将OCT技术延伸到不透明材料的厚度测量,从而提高了测量不透明材料厚度的精度。

著录项

  • 公开/公告号WO2021164202A1

    专利类型

  • 公开/公告日2021-08-26

    原文格式PDF

  • 申请/专利权人 SOOCHOW UNIVERSITY;

    申请/专利号CNCN2020/105692

  • 发明设计人 MO JIANHUA;WU QIAN;

    申请日2020-07-30

  • 分类号G01B11/06;

  • 国家 CN

  • 入库时间 2022-08-24 20:50:36

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