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Multiple layered optical devices using first-order coupling and permanent coupling
Multiple layered optical devices using first-order coupling and permanent coupling
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机译:使用一阶耦合和永久耦合的多个分层光学装置
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摘要
The system and method relate to the formation of an optical device that includes a stacked optical element layer using a silicon wafer, glass, or device as a substrate.The optical elements described herein may be fabricated on a temporary or permanent substrate.In some embodiments, the optical device may include a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) image sensor, a light emitting diode (LED), or a micro LED μ An LED is fabricated to include a transparent substrate or device, including a display, an organic light emitting diode (OLED), or a vertical cavity surface emitting laser (VCSEL).The optical element may have an intermediate layer formed between the optical elements and the intermediate layer may be included within a thickness of 1 nm to 3 nm.Diagram
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