;The nanowire is on the substrate in the opening of the patterned mask layer. By providing the patterned mask layer with a thermal conductivity greater than; ]]> ;the patterned mask layer is able to maintain a temperature of the surface thereof to a desired level when the nanowire is provided. This prevents undesired parasitic growth on the patterned mask layer, thereby improving the performance of the nanowire structure."/>
公开/公告号US2021265463A1
专利类型
公开/公告日2021-08-26
原文格式PDF
申请/专利号US202016799973
申请日2020-02-25
分类号H01L29/06;B82Y40;B82Y30;H01L27/18;H01L21/02;
国家 US
入库时间 2022-08-24 20:47:43