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High entropy alloy thin film coating and method for preparing the same
High entropy alloy thin film coating and method for preparing the same
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机译:高熵合金薄膜涂层及其制备方法
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摘要
A method for preparing a high entropy alloy thin film coating includes preparing a melt alloy by arc melting raw materials including five or more elements, casting the melt alloy into a mold to form a target, placing the target inside a vacuum chamber of a magnetron sputtering system, and rotatably fixing a substrate inside the vacuum chamber, spaced apart from the target. A high entropy alloy thin film is deposited on the substrate by high vacuum radio frequency sputtering inside the vacuum chamber.
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