FACETED MIRROR FOR A PROJECTION EXPOSURE SYSTEM AND PROJECTION EXPOSURE SYSTEM WITH THE CORRESPONDING FACETED MIRROR AND PROCEDURES FOR OPERATING THE SAME

摘要

The present invention relates to a facet mirror for a projection exposure system and a projection exposure system with a facet mirror with several mirror facets (21), each mirror facet (21) having a mirror body (33) with a mirror surface (34) and the facet mirror comprising at least one actuator (26) , wherein at least one mirror facet (21) can be deformed by actuating the actuator, and wherein the actuator (26) comprises at least one magnetorheological substance or a shape memory alloy or a bimetal, so that the mirror facet (21) can be deformed by a change in temperature or pressure or a change in a magnetic field is. The invention also relates to a method for operating a facet mirror or a projection exposure system.