首页>
外国专利>
Carbyne-Based Sensing Device for High Spatial Resolution in DNA Sequencing and Biomolecule Characterization and Method of Fabricating the Same
Carbyne-Based Sensing Device for High Spatial Resolution in DNA Sequencing and Biomolecule Characterization and Method of Fabricating the Same
展开▼
机译:基于Caryne的DNA测序中的高空间分辨率和生物分子表征的传感装置及其制造方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method of fabricating a sensing device for DNA sequencing and biomolecule characterization including the steps of fabricating a microelectrode chip having a silicon substrate and a silicon nitride diaphragm, attaching a monolayer graphene sheet to the silicon nitride diaphragm, dicing a portion of the monolayer graphene sheet to form a graphene microribbon, converting the graphene microribbon to a graphene nanoribbon, and converting the graphene nanoribbon to a carbyne. A sensing device for DNA sequencing and biomolecule characterization is also disclosed. The sensing device includes a silicon substrate, a cavity in the silicon substrate covered by a silicon nitride layer, microelectrodes attached to the silicon nitride layer, graphene covering the microelectrodes, and carbyne attached to a portion of the silicon nitride layer covering said cavity.
展开▼