Defect review sampling and normalization based on defect and design attributes

摘要

Decision trees and normalized reclassification are used to classify defects. Defect review sampling and normalization can be used for accurate Pareto ranking and defect source analysis. A defect review system, such as a broadband plasma tool and controller, may be used to bin defects using a decision tree based on defect properties and design properties. Class codes are assigned to at least some of the defects in each bean. Normalized reclassification assigns a class code to any unclassified defects in the bean. Additional decision trees can be used if any bean has more than one class code after normalized reclassification.