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Defect review sampling and normalization based on defect and design attributes
Defect review sampling and normalization based on defect and design attributes
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机译:基于缺陷和设计属性的缺陷检查采样和归一化
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摘要
Decision trees and normalized reclassifications are used to classify defects. Defect review sampling and normalization can be used for accurate Pareto ranking and defect source analysis. A defect review system, such as a broadband plasma tool and controller, can be used to bin defects using a decision tree based on defect attributes and design attributes. The class codes are assigned to at least some of the defects in each bin. The normalized reclassification assigns a class code to any unclassified defects in the bin. An additional decision tree may be used if any bean has more than one class code after normalized reclassification.
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