A method of coating a substrate with lacquer and a device for flattening a lacquer layer

摘要

PROBLEM TO BE SOLVED: To provide a method for coating a substrate with a lacquer and an apparatus for flattening a lacquer layer. An apparatus for flattening a lacquer layer on a substrate 26, in which a solvent atmosphere is created in a processing chamber 12, a drying apparatus 18 designed to reduce the solvent ratio of the lacquer layer, and a processing chamber 12. It is an apparatus having an evaporator 16 which can be formed. [Selection diagram] Fig. 1