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Microsystem technology components sealed with active solder, components for them and solder transfer processes for their manufacture

机译:MicroSystem技术部件用活性焊接密封,组件和其制造的焊料转移工艺

摘要

Component component in the form of a substrate (13; 13 ') or a cap (4; 4') for an individual component or for a group of connected components intended for later isolation, comprising at least one completely circumferential raised component intended for later sealing Frame as an integral component, which at least in its superficial area (5) consists of a material selected from metals, metal alloys, metal and semi-metal compounds containing oxygen, nitrogen and / or carbon, and semiconductors, and its width from the Inside to outside of the frame is measured in the range from 80 µm to 500 µm, characterized in that the frame is completely covered with an active solder material (7) with a melting point of <450 ° C, the active solder being a solder metal or is a solder alloy, the / the at least one metal selected from the metals of the IV. and V subgroup and at least one metal , selected from lanthanum and the lanthanides.
机译:用于单个部件的基板(13; 13')或帽(4; 4')的组分组分或用于较晚隔离的一组连接部件的帽(4; 4'),其包括以后的至少一个完全圆周的凸起部件 作为整体部件的密封框架,至少在其浅表面积(5)中由选自金属,金属合金,金属和半金属化合物的材料组成,含氧,氮和/或碳和半导体,其宽度 框架的内部在80μm至500μm的范围内测量,其特征在于框架完全覆盖有活性焊料(7),熔点<450℃,活性焊料是a 焊料金属或焊料合金,/ /的至少一种选自IV金属的金属。 和副组和至少一种金属,选自镧和镧系元素。

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