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Copper / graphene junction, its manufacturing method, and copper / graphene junction structure

机译:铜/石墨烯结,其制造方法和铜/石墨烯结结构

摘要

Problem: the copper member made of copper or copper alloy and the graphene containing carbon containing the graphene aggregate are strongly bonded to each other, and no peeling occurs even during the cold cycle loading. Problem to be solved: to provide a copper / graphene junction excellent in cold cycle reliability and a manufacturing method thereof.Copper / graphene junctionCopper and copper alloy membersGraphene containing carbonaceous component containing graphene aggregateIs a copper / graphene junction having a bonded structure;Between the copper member and the graphene containing carbon memberOn the carbonaceous member containing grapheneTi,Zr,NBAn active metal carbide layer containing carbide of one or more active metals selected from HF is formedBetween the active metal carbide layer and the copper memberMg solid solution in which mg is dissolved in the mother phase of Cu is formed.Diagram
机译:问题:由铜或铜合金制成的铜构件和含有石墨烯聚集体的碳烯的碳烯彼此强烈键合,即使在冷循环负载期间也不会发生剥离。 要解决的问题:提供优异的冷循环可靠性和其制造方法优异的铜/石墨烯结。 铜/石墨烯的铜合金成员含有碳质成分的碳质成分,含有石墨烯聚集体的铜/石墨烯结具有粘合结构;在铜构件和含有碳成员的石墨烯之间,含有石墨尼,Zr的碳质构件含有碳化物的碳化物碳化物层 从HF中选择的一种或多种活性金属形成为活性金属碳化物层和铜构件的固溶体,其中Mg溶解在Cu的母相中.diagram

著录项

  • 公开/公告号JP2021118357A

    专利类型

  • 公开/公告日2021-08-10

    原文格式PDF

  • 申请/专利权人 三菱マテリアル株式会社;

    申请/专利号JP20210007345

  • 发明设计人 寺▲崎▼ 伸幸;

    申请日2021-01-20

  • 分类号H01L23/373;C01B32/194;C01B32/21;C04B37/02;B23K20;

  • 国家 JP

  • 入库时间 2022-08-24 20:30:01

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