Ceramic / copper / graphene junction, its manufacturing method, and ceramic / copper / graphene junction structure

摘要

Problem to be solved: to provide a ceramic / copper / graphene junction excellent in cold cycle reliability, in which the copper member and the carbon containing carbon containing member are firmly bonded, and the current flowing through the junction portion can be suppressed, and no peeling occurs at the time of the cold cycle cycle load.Ceramic member 26 andCopper member 21 made of copper or copper alloyA graphene containing carbonaceous member 25 containing a graphene aggregateIs a ceramic / copper / graphene junction having a bonded structure;At the bonding interface between the copper member 21 and the graphene containing carbon member 25On the carbonaceous member 25 side containing grapheneTi,Zr,NBAn active metal carbide layer 41 comprising carbide of one or more active metals selected from HF is formedBetween the active metal carbide layer 41 and the copper memberMg solid solution layer 42 is formed in the mother phase of Cu.Diagram