EXTREME ULTRAVIOLET PHOTON GENERATOR USING MAGNETIZED ARC PLASMA

摘要

The present invention relates to an extreme ultraviolet photon generating device, and the extreme ultraviolet photon generating device according to an embodiment of the present invention has an anode hollow formed therein, and a positive electrode to generate EUV photon an anode part electrically connected; a cathode portion disposed in the anode hollow, the cathode hollow is formed therein, and the negative electrode is electrically connected; an insulating part disposed between the anode part and the cathode part and electrically insulating the anode part and the cathode part from each other; and a magnetic field hollow is formed therein, the anode part is disposed in the magnetic field hollow, a magnetic field part for generating a magnetic field, and a gas for plasma discharge to generate extreme ultraviolet photons through the cathode part hollow can be supplied there is. According to the present invention, extreme ultraviolet photons may be generated using a magnetic arc plasma source together with a discharge produced plasma (DPP) method to generate extreme ultraviolet photons with high output and high efficiency.