METHOD OF PREPARING ULTRA-THIN AMORPHOUS CARBON FILM USING SOLUTION PHASE

摘要

A method for manufacturing an ultra-thin amorphous carbon thin film based on a solution process is disclosed. The method for producing the amorphous carbon thin film comprises the steps of: (a) coating a carbon precursor solution containing a carbon precursor and a compound represented by Structural Formula 1 on a conductive substrate once or a plurality of times to form a coating layer; and (b) irradiating microwaves on the coating layer coated on the conductive substrate; using a solution process that can be easily scaled to enable precise thickness control in nanometers and uniform amorphous A carbon thin film can be manufactured. [Structural Formula 1] In Structural Formula 1, R ¹ to R ³ are the same as or different from each other, and each independently represents a hydrogen atom or a C1 to C3 alkyl group, R ⁴ to R ⁶ are the same as or different from each other, and each independently represents a hydrogen atom or a C1 to C3 alkyl group.