METHOD AND DEVICES FOR ACOUSTICALLY TESTING MEMS COMPONENTS

摘要

Embodiments relate to a method for acoustically testing at least one MEMS component of a plurality of MEMS components. The method has a step of providing at least one MEMS component, a step of exciting the at least one MEMS component so as to produce an acoustic vibration, a step of detecting the acoustic vibration of the at least one MEMS component using at least one acoustic sensor, and a step of evaluating the acoustic vibration of the at least one MEMS component detected using the at least one acoustic sensor in order to test the at least one MEMS component for a target functionality.